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Integration of Capacitive and Piezoelectric Accelerometers Using a Digital Approach

Yu-Sheng Lu and Po-Chen Lee
Department of Mechatronic Engineering, National Taiwan Normal University, Taipei 106, Taiwan

Abstract—This study is to obtain an acceleration signal with a nice quality and apply it to a linear motion stage. The accelerometers used in this paper are piezoelectric and capacitive accelerometers. Since a piezoelectric accelerometer cannot measure low-frequency acceleration, its application to servo systems is limited. On the contrary, a capacitive accelerometer is able to measure low-frequency acceleration. However, its output noise is significant, and its dynamic bandwidth is small compared with the piezoelectric accelerometer. This paper proposes a high-performance accelerometer, which digitally integrates the salient features of both capacitive and piezoelectric accelerometers. The proposed accelerometer can measure both low- and high- frequency acceleration. It is also applied to compensating for load disturbance in a linear drive for performance improvement.

Index Terms—capacitive accelerometer, digital integration, motion control, piezoelectric accelerometer

Cite: Yu-Sheng Lu and Po-Chen Lee, "Integration of Capacitive and Piezoelectric Accelerometers Using a Digital Approach," International Journal of Electrical and Electronic Engineering & Telecommunications, Vol. 8, No. 6, pp. 346-351, November 2019. Doi: 10.18178/ijeetc.8.6.346-351